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产品概述 Product Overview
The
Full-Size XYZ stage, which is of precision and operability, provide X,Y and Z
movement . The X/Y direction adopts plain shaft and micrometer, while the Z direction adopts the combination structure of
plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please
contact for more information.
规格说明 Specification
● Working
Pressure：10-11mbar~1 bar
● Bakeable
to 120℃
● Welded
Bellows Seal with SS 316
● Clear
Bore up to 102mm
● Top
mounting flange: CF flange, clear hole
● Bottom
mounting flange: CF flange, tapped hole
● X/Y driver: Step motor with 10μm + micrometer
● Z
driver: Step motor with 10μm
● minimum flange to flange(compressed) distance is 300mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch |
mm |
|
| 152 | 6 | 203 | 8 | ±12.5 | Up to 650 |
产品尺寸 Dimension Drawing
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