Full-size XYZ Stage Current Location: Home > Product Center > Vacuum Technology > Component product > Linear Motion Feedthroughs > Full-size XYZ Stage

产品概述 Product Overview

The Full-Size XYZ stage, which is of precision and operability, provide X,Y and Z movement . The X/Y direction adopts plain shaft and micrometer, while the Z direction adopts the combination structure of plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please contact for more information.


规格说明 Specification

● Working Pressure:10-11mbar~1 bar
● Bakeable to 120℃
● Welded Bellows Seal with SS 316
● Clear Bore up to 102mm
● Top mounting flange: CF flange, clear hole
● Bottom mounting flange: CF flange, tapped hole
● X/Y driver: Step motor with 10μm + micrometer
● Z driver: Step motor with 10μm
● minimum flange to flange(compressed) distance is 300mm


A Flange OD B Flange OD XY Movement Z Movement
mm inch mm inch mm
152 6 203 8 ±12.5 Up to 650


产品尺寸 Dimension Drawing


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