产品概述 Product Overview

Radial Telescopic Transfer Arm provides a cost-effective solution for radial distribution sample transfer applications by arm rotation and extension.
A high torque magnetic-coupled drive precisely rotates the transfer arm to align with the desired chamber port. A second rotary drive is used to drive the innovative telescopic mechanism to provide an arm extension up to 1200mm. The end can carry sample holder grabber.

There are types with motorized and manually motivated optional, and the arm has up to 5 degrees of freedom.
Please contact Fermi for more information.

规格说明 Specification

● UHV Rated better than 5×10^-10 mbar

● Bakeable to 120 ℃

● High Load Carrying Capability 

● Extended up to 1200mm

● Continuous Rotary Motion

● Linear Reproducibility: <1 mm(motorized)

● Rotation Reproducibility: <0.1°(motorized)

● Z Option Module:CF63 Port Aligner or Linear Translator In 50mm Stroke

产品尺寸 Dimension Drawing

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