产品概述 Product Overview FERMI BL-1000s Vacuum UV source is an ultra-high efficiency UV source based on revolutionary local field plasma mechanism, integrated with the latest solid RF source technology. The VUV source is an electrode-free and ignit

产品概述 Product Overview FERMI BL-1010s Focused VUV Source is a specially designed high brilliance multi-gas VUV source with a three-stage differential chamber and UHV valve isolated focusing capillary. It can be operated with a wide variety of dif